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Zirconium Yttrium (Zr-Y) alloy sputtering target

 Zirconium Yttrium (Zr-Y) alloy sputtering target

 

 

 

 

 

MATERIAL SAFETY DATA SHEET

 

ZIRCONIUM YTTRIUM ALLOY, Zr-Y

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GENERAL

 

COMPANY'S NAME: Huizhou TianYi Rare Material Co.,Ltd

 

COMPANY'S TEL #:    0086-752-2021182

 

COMPANY'S Address:   12K of Shiji, Shijixingtian Bldg, YanDa Road, Huizhou China

 

DATE MSDS PREPARED: 03/05/06

 

DATE MSDS REVISED:          02/12/13

 

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1. PRODUCT IDENTIFICATION

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COMMON CHEMICAL NAME: 

CHEMICAL FORMULA:     ZrY

 

CHEMICAL NATURE: METALLIC ELEMENT

CAS NUMBER: (ZrY)  7440-67-7/7440-65-5

 

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2. PHYSICAL AND CHEMICAL PROPERTIES

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BOILING POINT:  N/A

 

MELTING POINT:       N/A

SPECIFIC GRAVITY (H2O=1): N/A

VAPOR PRESSURE:   N/A.

VAPOR DENSITY:       N/A.

 

% VOLATILE BY VOLUME:      N/A.

 

SOLUBILITY:       INSOLUBLE

 

APPEARANCE AND ODOR:     SHINY METALLIC DARK GRAY TO BLACK PELLETS, PIECES OR

 

POWDER, NO ODOR

DENSITY OF ZrY:       6.0018G/CC

 

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3. HAZARD IDENTIFICATION

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HAZARDOUS COMPONENTS%

 

ZIRCONIUM-YTTRIUM ALLOY:      0-100

OSHA/PEL    5 mg/m3

ACGIH/TLV   5 mg/m3

 

HMIS RATINGS

 

(SPONGE OR POWDER):

 

EQUIP: F:     GLASSES, GLOVES, APRON, AND RESPIRATOR

 

FLASH POINT:     NON-FLAMMABLE

FLASH POINT METHOD:  N/P

LOWER EXPLOSIVE LIMIT:     N/R

 

UPPER EXPLOSIVE LIMIT:      N/R

 

EXTINGUISHING MEDIA:  WATER, CO2, FOAM, and DRY CHEMICAL SPECIAL FIRE

FIGHTING PROC:      USE SELF CONTAINED BREATHING APPARATUS & FULL

 

PROTECTIVE CLOTHING.

UNUSUAL FIRE AND EXPL HAZRDS:  N/R

REPORT FOR NIIN:   0F034378

 

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4. HEALTH HAZARD INFORMATION

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EFFECTS OF EXPOSURE:MAY CAUSE IRRITATION TO THE RESPIRATORY TRACT.

ACCUTE EFFECTS: MAY CAUSE IRRITATION TO THE GASTROINTESTINAL TRACT. MAY CAUSE IRRITATION

INHALATION: MAY CAUSE SKIN GRANULOMAS. NO OTHER CHRONIC HEALTH EFFECTS RECORDED.

INGESTION: MAY AFFECT THE RESPIRATORY SYSTEM AND SKIN

SKIN:  No

CHORNIC EFFECTS: No

SKIN: No

TARGET ORGANS:  N/A

MEDICAL CONDITIONS GENERALLY CARCINOGENICITY:  YES

NTP: IARC OSHA

LD50-LC50 MIXTURE:  YES

ROUTE OF ENTRY

INHALATION: No

SKIN:

INGESTION:

HEALTH HAZ ACUTE AND

CHRONIC:

EYES/SKIN/INHALATION:

NTP:

IARC:  No

OSHA:  NONE IRRITATION  EXISTING LUNG/BLOOD DISORDERS

EXPLANATION CARCINOGENICITY: SIGNS/SYMPTOMS OF OVEREXP: MEDICAL COND. AGGRAV. BY EXP:

TO THE BEST OF OUR KNOWLEDGE THE CHEMICAL, PHYSICAL AND TOXICOLOGICAL PROPERTIES OF ZIRCONIUM-YTTRIUM ALLOY HAVE NOT BEEN THOROUGHLY INVESTIGATED AND RECORDED. ZIRCONIUM-YTTRIUM ALLOY COMPOUNDS ARE NOT AN IMPORTANT INDUSTRIAL POISON. MOST ZIRCONIUM-YTTRIUM ALLOY COMPOUNDS IN COMMON USE ARE INSOLUBLE AND CONSIDERED INERT. PULMONARY GRANULOMA IN ZIRCONIUM-YTTRIUM ALLOY WORKERS HAS BEEN REPORTED.

 

IRRITATION. YTTRIUM SALTS HAVE BEEN SHOWN TO CAUSE PERMANENT OPACIFICATION OF THE CORNEA AFTER CONTACT OF THE EYE WHEN THE CORNEAL EPITHELIUM HAS BEEN DAMAGED & MAY CAUSE BLOOD EFFECTS IF ABSORBED INTO THE BODY. MAY CAUSE

 

LUNG EFFECTS. HARMFUL IF SWALLOWED. CARCINOGENICITY NO CARCINOGENICITY

 

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5. FIRST AID MEASURES

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LESS THAN 100. VARIES WITH PARTICLE SIZE

DRY TABLE SALT. TYPE D FIRE EXTINGUISHER. DO NOT USE WATER CARBON DIOXIDE OR HALOCARBON EXTINGUISHING AGENT.

 IF FINES BECOME IGNITED IT IS ADVISABLE TO ALLOW THE MATERIAL TO BURNOUT. FIRE CAN BE CONTROLLED BY SMOTHERING WITH DRY TABLE SALT OR USING TYPE D DRY-POWDER FIRE EXTINGUISHER MATERIAL. WEAR REFLECTIVE HEAT-RESISTANT SUIT.

DO NOT SPRAY WATER ON BURNING ZIRCONIUM-YTTRIUM ALLOY. CARBON DIOXIDE IS NOT EFFECTIVE IN EXTINGUISHING BURNING ZIRCONIUM-YTTRIUM ALLOY. IF A FIRE STARTS IN A MASS OF WET FINES. THE INITIAL FIRE MAY BE FOLLOWED BY AN EXPLOSION.

THEREFORE, WHEN IN DOUBT. PERSONNEL SHOULS RETIRE AND NOT ATTEMPT TO EXTINGUISH THE FIRE. THE EXPLOSIVE CHARACTERISTIC OF SUCH MATERIAL IS CAUSED BY THE STEAM AND HYDROGEN GENERATED WITHIN THE BURNING MASS. SPONTANEOUSLY COMBUSTIBLE IN DRY POWDER FORM. FLAMMABLE AND EXPLOSIVE AS DUST OR POWDER. ALSO IN THE FORM OF BORINGS AND SHA VINGS. ZIRCONIUM-YTTRIUM ALLOY IS A VERY DANGEROUS FIRE HAZARD IN THE FORM OF DUST WHEN EXPOSED TO HEAT. FLAME OR BY CHEMICAL REACTION WITH AIR, ALKALI HYDROXIDES, ALKALI METAL CHROMATES, DICHROMATES, MOLYBDATES, SULFATES, TUNGSTATES, BORAX, CCL4, COPPER OXIDE, LEAD, LEAD OXIDE, PHOSPHOROUS, KCLO3, KNO3, NITRYL FLUORIDE. MAY BE EXTREAMELY SENSITIVE TO SHOCK AND STATIC ELECTRICITY MAY CAUSE SPONTANEOUS IGNITION.

 

SOLID WILL NOT IGNITE FIGH SURFACE AREA MATERIAL.

SUCH AS 10 MICRON POWDER MAY AUTOIGNITE. AT ROOM TEMP. FINE CHIPS, TURNINGS, OR GRINDING DUST PRODUCED FROM THIS ARE FLAMMABLE. IFNITION POINT FOR SPONGE VARIES FROM 200 TO ABOVE 500 OC. DEPENDING ON PARTICLE SIZE.

 

INGESTION:

YTTRIUM EYES: SKIN:

INHALATION:

EYES CONTACT:

SKIN CONTACT: INGESTION:

INHALATION

FLUSH EYES WITH PLENTY OF WATER FOR AT LEAST 15 MINUTES, OCCASIONALLY LIFTING THE UPPER AND LOWER EYELIDS. GET MEDICAL AID.

 BRUSH MATERIAL OFF SKIN. WASH AFFECTED AREA WITH MILD SOAP AND WATER.

1-2 GLASSES OR MILK OR WATER AND INDUCE VOMITING. SEEK MEDICAL ATTENTION IF SYMPTOMS PERSIST. NEVER INDUCE VOMITING OR GIVE ANYTHING BY MOUTH TO AN UNCONSCIUS PERSON.

 

REMOVE VICTIM TO FRESH AIR. KEEP WARM AND QUIET, AND GIVE OXYGEN IF BREATHING IS DIFFICULT.

FLUSH W/PLENTY OF WATER FOR 20 MINUTES WASH WITH SOAP & WATER

REMOVE PERSON TO FRESH AIR. GIVE OXYGEN IF DIFFICULT BREATHING / APPLY CPR IF NOT BREATHING.

GIVE 1-2 GLASSES OF WATER & INDUCE VOMITING IF CONSCIOUS. OBTAIN MEDICAL ATTENTION IN ALL CASES.

 

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6. FIRE - FIGHTING MEASURES

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ZIRCONIUM-YTTRIUM ALLOY IGNITION POINT:

MINIMUM EXPLOSIBLE

CONCENTRATION9G/M3):

EXTINGUISHING MEDIA:

 

FIRE FIGHTING PROCEDURES: UNUSUAL FIRE & EXPLOSION  HAZARD: SUITABLE EXTINGUISHING

 

AGENTS:  PRODUCT IS NOT FLAMMABLE. USE FIRE FIGHTING MEASURES THAT SUIT THE SURROUNDING FIRE.

PROTECTIVE EQUIPMENT:     NO SPECIAL MEASURES REQUIRED.

 

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7. ACCIDENTAL RELEASE MEASURES

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ZIRCONIUM-YTTRIUM ALLOY             

STEPS TO BE TAKEN IN CASE MATERIAL IS RELEASED OR       

SPILLED:      SCOOP OR VACCUM SPILL USING A HIGH EFFICIENCY      

       PARTICULATE ABSOLUTE (HEPA) AIR FILTER AND PLACE IN A  

       CLOSED CONTAINER FOR PROPER DISPOSAL. STAY AWARE OF FIRE  

RESPIRATORY PROTECTION HAZARD.     

             

(SPECIFY TYPE):       USE NIOSH-APPROVED RESPIRATOR IF PROCESSING WILL    

       GENERATE DUST.    

VENTILATION:    GENERAL EXHAUST IS RECOMMENDED. 

PROTECTIVE GLOVES:    USE OF GLOVES ADVISABLE TO AVOID CUTS.      

EYE PROTECTION:   SAFETY GLASES.     

PROTECTIVE CLOTHING:       EVALUATE EACH SITUATION FOR POSSIBILITY OF FLASH BURNS. 

       WORK AREAS MUST BE PERIODICALLY CLEANED TO AVOID    

       ACCUMULATION OF FLAMMABLE DUST. IF DUST HAS

       ACCUMULATED WEAR REFLECTIVE HEAT-RESISTANT SUIT WHILE

ADDITIONAL PROTECTIVE     CLEANING. 

             

MEASURES. EVALUATE EACH SITUATION FOR POSSIBILITY OF FLASH BURNS. 

       WORK AREAS MUST BE PERIODICALLY CLEANED TO AVOID    

       ACCUMULATION OF FLAMMABLE DUST. IF DUST HAS

       ACCUMULATED, WEAR REFLECTIVE HEAT-RESISTANT SUIT WHILE      

ENVIRONMENTAL HAZARDS: CLEANING. 

       NONE   

WASTE DISPOSAL METHOD:  DISPOSE OF IN ACCORDANCE WITH ALL STATE, FEDERAL AND      

       LOCAL REGULATIONS.   

YTTRIUM           

PERSON RELATED SAFETY         

PRECAUTIONS:  NOT REQUIRED.      

MEASURES FOR ENVIRONMENTAL           

PROTECTION:    DO NOT ALLOW MATERIAL TO BE RELEASED TO THE 

MEASURES FOR CLEANING/  ENVIRONMENT WITHOUT PROPER GOVERNMENTAL PERMITS.     

             

COLLECTING:     PICK UP MECHANICALLY.      

 

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8. HANDLING AND STORAGE

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ZIRCONIUM-YTTRIUM ALLOY

 

HANDLING:  WASH THOROUGHLY AFTER HANDLING. REMOVE CONTAMINATED

CLOTHING AND WASH BEFORE REUSE. USE WITH ADEQUATE

VENTILATION. MINIMIZE DUST GENERATION AND

 

ACCUMULATION. AVOID CONTACT WITH EYES, SKIN AND

CLOTHING. KEEP CONTAINER TIGHTLY CLOSED. AVOID INGESTION

 

AND INHALATION.

STORAGE:   STORE IN A TIGHTLY CLOSED AREA. AWAY FROM INCOMPATIBLE

SUBSTANCES.

 

IF MATERIAL RELEASED/SPILL:    COLLECT AND PLACE IN A POLYETHYLENE/POLYETHYLENE-LINED

WASTE CONTAINER. STORE UNDER COOL AND DRY CONDITIONS

 

UNTIL DISPOSED.

MATERIAL IN DAMAGED/LEAKING CONTAINERS SHOULD BE

TRANSFERRED TO AN INTACT METAL/POLYETHYLENE CONTAINER.

 

NEAUTRALIZING AGENT: N/K

WASTE DISPOSAL METHOD:  CONTACT A PERMITTED WASTE DISPOSER(TSD) TO ASSURE

COMPLIANCE WITH ALL CURRENT LOCAL, STATE AND FEDERAL

 

REGULATIONS.

 

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9. EXPOSURE CONTROLS AND PERSONAL PROTECTION

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ZIRCONIUM-YTTRIUM ALLOY

 

PERSONAL PROTECTIVE

EQUIPMENT:       GENERAL PROTECTIVE AND HYGIENIC MEASURES

THE USUAL PRECAUTIONARY MEASURES FOR HANDLING

 

CHEMICALS SHOULD BE FOLLOWED. KEEP AWAY FROM FOOD

STUFFS, BEVERAGES AND FEED.

REMOVE ALL SOILED AND CONTAMINATED CLOTHING

 

IMMEDIATELY. WASH HANDS BEFORE BREAKS AND AT THE END

OF WORK.

BREATHING EQUIPMENT:       USE SUITABLE RESPIRATOR WHEN HIGH CONCENTRATIONS ARE

 

PRESENT.

PROTECTION OF HANDS:      IMPERVIOUS GLOVES. CHECK PROTECTIVE GLOVES PRIOR TO

EACH USE FOR THEIR PROPER CONDITION.

 

MATERIAL OF GLOVES:   THE SELECTION OF SUITABLE GLOVES NOT ONLY DEPENDS FOR

THE MATERIALS, BUT ALSO ON QUALITY. QUALITY WILL VARY

FROM MANUFACTURER TO MANUFACTURER.

EYE PROTECTION:   SAFETY GLASSES.

 

RESPIRATORY PROTECTION:       USE NIOSH.MSHA APPROVED & PROPERLY FITTED DUST

 

RESPIRATOR IF PEL IS EXCEEDED.

 

VENTILATION:    MECHANICAL, A MINIMUM VELOCITY OF 100 CUBIC FEET PER

MINUTE IS RECOMMENDED.

PROTECTIVE GLOVES:    REQUIRED

 

REPORT FOR NIN:    00F034378

EYE PROTECTION:   CHEMICAL GOGGLES/SAFETY GLASSES

OTHER PROTECTIVE EQUIPMENT:     LABORATORY COAT

 

WORK HYGIENIC PRACTICES:      WASH THOROUGHLY AFTER HANDLING & BEFORE EATING OR

DRINKING.

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10. STABILITY AND REACTIVITY

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ZIRCONIUM-YTTRIUM ALLOY

STABILITY:   STABLE UNDER NORMAL CONDITION

CONDITIONS TO AVOID:  HIGH TEMEPERATURES, SOURCES OF IGNITION. MAY BE

EXTREAMLY SENSITIVE TO SHOCK AND STATIC ELECTRICITY TO

 

CAUSE SPONTANEOUS COMBUSTION. MAY BE AN EXPLOSION

HAZARD IN THE FORM OF DUST BY CHEMICAL REACTION WITH

AIR.

 

 

 

INCOMPATIBILITY

(MATERIAL TO AVOID):    STRONG OXIDISING AGENTS, AIR, ALKALI HYDROXIDES. ALKALI

METAL CHROMATES, DICHROMATES, MOLYBDATES, SULFATES,

TUNGSTATES, BORAX, CCL4, COPPER OXIDE, LEAD, LEAD OXIDE,

PHOSPHORUS, KCLO3,KNO3 AND ACIDS. ZIRCONIUM-YTTRIUM

 

ALLOY MATERIAL IS RAPIDLY DISSOLVED BY HYDROFLUORIC

 

       ACID OR HYDROFLURIC –NITRIC ACID MIXTURES. ABOVE 200 º C,

       ZIRCONUM REACTS EXOTHERMICALLY WITH HALOGEN GASES,   

       FLUORINE, CHLORINE, BROMINE, IODINE, AND HALOCARBONS,    

       INCLUDING CARBON TETRA CHLORIDE, CARBON TETRAFLUORIDE     

       AND FREONS. NITRYL –FLUORIDE, FN02 WILL INITIATE REACTION      

       WITH ZIRCONIUM-YTTRIUM ALLOY AT ROOM TEMPERATURE TO  

HAZARDOUS DECOMPOSITION    PRODUCE A GLOWING OR WHITE INCANDESCENCE.  

             

PRODUCTS: ZIRCONIUM-YTTRIUM ALLOY DOES NOT DECOMPOSE. THE ABOVE     

       REACTIONS WITH INCOMPATIBLE MATERIALS WILL GENERATE     

       HAZARDOUS REACTIONS PRODUCTS SUCH A S FLAMMABLE  

       HYDROGEN, TOXIC FUMES OF NITROGEN OXIDES OR CORROSIVE     

       ZIRCONIUM-YTTRIUM ALLOY HALIDE VAPORS.     

HAZARDOUS POLYMERIZATION:  WILL NOT OCCUR    

CHEMICAL STABILITY:     STABLE UNDER NORMAL TEMPERATURES AND PRESSURES.  

CONDITIONS TO AVOID:  EXTREAME HEAT     

MATERIALS TO AVOID:    CONCENTRATED MINERAL ACIDS & OXIDIZERS.   

HAZARDOUS DECOMPOSITION          

PRODUCTS: TOXIC METAL FUMES AND PARTICLES.    

HAZARDOUS PLYMERIZATION:     DOES NOT OCCUR  

CONDITIONS TO AVOID (POLY)    NONE KNOWN   

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11. TOXICOLOGICAL INFORMATION

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LD50/LC50:  N/A

CARCINOGENICITY:  N/A

EPIDEMIOLOGY: NO INFORMATION AVAILABLE.

 

REPRODUCTIVE EFFECTS:    NO INFORMATION AVAILABLE.

NEUROTOXICITY:      NO INFORMATION AVAILABLE.

MUTAGENICITY: NO INFORMATION AVAILABLE.

 

 

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12. DISPOSAL CONSIDERATIONS

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GENERAL:    CHEMICAL WASTE GENERATORS MUST DETERMINE WHETHER A

DISCARDED CHEMICAL IS CLASSIFIED AS A HAZARDOUS

WASTE. US EPA GUIDELINES FOR THE CLASSIFICATION

 

DETERMINATION ARE LISTED IN 40 CFR PART

CLASSIFICATION.

RCRA P-SERIES: NONE LISTED

 

RCRA U-SERIES:       NONE LISTED.

RECOMMENDATION:       CONSULT STATE, LOCAL OR NATIONAL REGULATIONS FOR

DISPOSAL

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13. TRANSPORT INFORMATION

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UN NUMBER:      NONE

HAZARD CLASS: NOT A HAZARDOUS MATERIAL FOR TRANSPORTATION.

 

ADR//RID CLASS:       NONE

IMDG CLASS:      NONE

 

AIR TRAN. ICAO/IATA CLASS: NONE

MARITIME TRAN. IMDG CLASS:    NONE

 

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14. OTHER INFORMATION

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THIS SAFETY DATA SHEET SHOULD BE USED IN CONJUNCTION WITH TECHNICAL SHEETS. IT DOES NOT REPLACE THEM. THE INFORMATION GIVEN IS BASED ON OUR KNOWLEDGE OF THIS PRODUCT, AT THE TIME OF PUBLICATION. IT IS GIVEN IN GOOD FAITH. THE ATTENTION OF THE USER IS DRAWN TO THE POSSIBLE RISKS INCURRED BY USING THE PRODUCT FOR ANY OTHER PURPOSE OTHER THAN THAT FOR WHICH IT WAS INTENDED. THIS DOES NOT IN ANY WAY EXCUSE THE USER FROM KNOWING AND APPLYING ALL THE REGULATIONS GOVERNING HIS ACTIVITY. IT IS THE SOLE RESPONSIBILITY OF THE USER TO TAKE ALL PRECAUTIONS REQUIRED IN HANDLING THE PRODUCT. THE AIM OF THE MANDATORY REGULATIONS MENTIONED IS TO HELP THE USER TO FULFILL HIS OBLIGATIONS REGARDING THE USE OF HAZARDOUS PRODUCTS.