Huizhou Tianyi rare material Co., Ltd

About TYR
Product classification
  Sputtering Target
  Rare Earth Material
  Evaporation Material
  Chemical Reagent
  High Pure Metals
Product Details

Tantalum oxide (Ta2O5, Ta2Ox) sputtering targets


Purity: 99.99%

Shape: Discs, disks, step disk, delta, plate, sheets or made per drawing

Diameter: 355.6mm (14") max.

Single piece Size: Length: <500mm, Width: <250mm, Thickness: >1mm, if larger size than this, we can do it as Tiles joint by 45 degree or 90 degree

Made sputtering targets method: hot pressing (HP), hot/cold isostatic pressing (HIP, CIP), and vacuum melting, vacuum sintering


Tantalum pentoxide, density: 8.20 g/cm3 ,melt point: 1872oC, white, odorless powder. It is a white solid that is insoluble in all solvents but is attacked by strong base and hydrofluoric acid. Both orthorhombic and hexagonal phases are known. Ta2O5 is a high refractive index, low absorption (i.e.colourless), inert material, which makes it useful for coatings.
Tantalum pentoxide is a highly robust material, decomposing thermally above 1470 °C.

Applications: electronics, high speed tools, DRAM capacitor, glass, chemicals, made for Tantalum metals, crystals, preparation of lithium tantalite single crystals, chemical processing e.t.c

Owing to its high band gap of 3.7 eV, Ta2O5 has found a variety of uses in electronics. It is used to make capacitors in automotive electronics, cell phones, and pagers, electronic circuitry; thin-film components; and high-speed tools. In the 1990s, interest grew in the use of tantalum oxide as a high-k dielectric for DRAM capacitor applications. It is used in on-chip MIM capacitors for RF CMOS integrated circuits. Due to its high index of refraction, Ta2O5 has been utilized in the fabrication of the glass of many photographic lenses.

Both low and high temperature polymorphs exist. The low temperature form is known as β-Ta2O5, and the high temperature form is known as α-Ta2O5. The transition point between these two forms has been reported as 1360 °C. The transition is slow but reversible. The structures of both polymorphs consist of chains built from octahedral and pentagonal bipyramidal polyhedra sharing opposite vertices. These chains are further joined by sharing edges.


We also supply below oxie ceramic sputtering targets material:


Aluminum Oxide Al2O3 target                                  Aluminum Zinc Oxide Al2O3-ZnO Al-ZnO target

Antimony Oxide Sb2O3 target                                   Antimony Tin Oxide Sb2O3-SnO ATO target

Chromium Oxide Cr2O3 target                                  Copper Oxide CuO, Cu2O target

Cerium Oxide CeO2 Target                                       Cobalt Oxide target CoO, Co2O3, Co3O4 target

Dysprosium Oxide Dy2O3 target                               Eur Oxide Eu2O3 target

Erbium Oxide Er2O3 target                                        Germanium Oxide GeO2 target

Gadolinium Oxide Gd2O3 target                               Gallium Oxide Ga2O3 target

Hafnium Oxide HfO2 target                                       Hafnium Yttrium Oxide HfO2-Y2O3 target

Holmium Oxide Ho2O3 target                                   Iron Oxide Fe2O3, Fe3O4 target

Indium Oxide In2O3 target                                         Indium Zinc Oxide, In2O3-ZnO target

Indium Zinc Gallium Oxide In2O3-ZnO-Ga2O3, IZGO target

Indium Gallium Oxide In2O3-Ga2O3, IGO target

Indium Tin Oxide In2O3-SnO2, ITO target               Lanthanum Oxide La2O3 target

Lutetium Oxide Lu2O3 target                                     Magnesium Oxide MgO target

Molybdenum Oxide MoO3 target                                Manganese Oxide MnO2,MnO target

Nickel Oxide NiO target                                              Niobium Oxide Nb2O5, Nb2Ox target

Neodymium Oxide Nd2O3 target                                Praseodymium Oxide Pr6O11 target

Samarium Oxide Sm2O3 target                                   Scandium Oxide Sc2O3 target

Silicon Dioxide SiO2 target                                        Silicon Monoxide SiO target

Strontium Titanate SrTiO3 target                               Strontium Barium Titanate SrBaTiO3 target

Strontium Ruthenate SrRuO3 target                           Barium Titanate BaTiO3 target

Terbium Oxide Tb4O7 Target                                          Tantalum Oxide Ta2O5, Ta2Ox target

Titanium Oxide TiO, TiO2, Ti2O3, Ti3O5 target

Thulium Oxide Tm2O3 target                                          Tin Oxide SnO, SnO2 target

Tungsten Oxide WO3, WO2.9 target                               Tungsten Lithium Oxide WO3-Li2O target

Ytterbium Oxide Yb2O3 target                                        Yttrium Oxide Y2O3 target

Zircon Oxide ZrO2 target                                                  Zinc Oxide ZnO target

Zirconium Oxide Yttria Stabilized ZrO2-Y2O3, YSZ target

Calcium Oxide CaO target                                                  Cadmium Oxide CdO target

Doped Boron Oxide taret ZnO-B2O3, ZrO2-B2O3 target

Bismuth Oxide Bi2O3 target                                               Bismuth Ferrite BiFeO3 target

Vanadium Oxide V2O5, VO2 target                                  Ruthenium Oxide RuO2 target

Lead Oxide PbO target                                                       LaTiO3, SrTiO3-La, EuTiO3 target

Yttrium Barium Copper Oxide YBCO taret                       Gadolinium Barium Copper Oxide, GdBaCuOx target

LaMnO3 target, LaSrMnOx target                                     Barium Oxide BaO target

Lead zirconate titanate PbZrTiO3, PZT target                   Y3Fe5O12, YIG target



We have only listed the more popular material. Please feel free contact us with any special requirements at any times, we will try to get back for you ASAP.

Product classification

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