Huizhou Tianyi rare material Co., Ltd

About TYR
Product classification
  Sputtering Target
  Rare Earth Material
  Evaporation Material
  Chemical Reagent
  High Pure Metals
Product Details

Zirconium disilicide, ZrSi2 ceramic sputtering target

purity: 99.5%

Shape: Discs, disks, step disk, delta, plate, sheets or made per drawing

Diameter: 355.6mm (14") max.

Single piece Size: Length: <500mm, Width: <250mm, Thickness: >1mm, if larger size than this, we can do it as Tiles joint by 45 degree or 90 degree

Made sputtering targets method: hot pressing (HP), hot/cold isostatic pressing (HIP, CIP), and vacuum melting, vacuum sintering

Zirconium(IV) silicide is an inorganic chemical compound with the chemical formula ZrSi2, consisting of zirconium and silicon atoms. Appearance: Grey odorless powder,

Molar mass: 147.39, density: 4.88g/cm3, Melting point: 1620oC (1790oC), Element: Si: 38.11, Zr: 61.89.

Applications: the raw material made in metal ceramic (cermet), the crucible for made semiconductor thin film coating material

We also supply below Silicide sputtering targets material:


Chromium Silicide , CrSi2 target       

Cobalt Silicide , Co3Si target       

Hafnium Silicide , HfSi2 target       

Molybdenum silicide, MoSi2, Mo5Si3 target       

Nickel Silicide , NiSi target       

Niobium Silicide , Nb5Si3, NbSi2 target       

Tantalum Silicide , Ta5Si3, TaSi2 target       

Titanium silicide, Ti5Si3, TiSi2 target       

Tungsten Silicide , WSi2 target       

Vanadium silicide , V3Si, VSi2 target   

 Zirconium disilicide, ZrSi2 targets    


Product classification

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