Oxide Sputteirng Targets
Oxide Sputtering Targets
Shape: discs, plate, rod, tube, sheet, Delta, and per drawing
Spec.:
Diameter: 355.6mm (14") max.
Single piece Size: Length: <500mm, Width: <250mm, Thickness: >1mm,
if larger size than this, we can do it as tiles joint by 45 degree or 90 degree.
Made sputtering targets method: hot pressing (HP), hot/cold isostatic pressing (HIP, CIP), and vacuum melting, vacuum sintering
Material Name |
Purity (Composition) |
Al2O3 |
99.8%, 99.99% |
Al2O3-ZnO (AZO) |
99.99%, 2-98wt% |
Sb2O3 |
99.9% |
Sb2O3-SnO2 (ATO) |
99.99%, 90/10wt%, made per requested |
Cr2O3 |
99.9% |
CuO, Cu2O |
99.9% |
Fe3O4, FeO, Fe2O3 |
99.9% |
In2O3 |
99.9% |
In2O3-ZnO |
99.99%, 90/10wt%, made per requested |
MgO |
99.99% |
MoO3 |
99.5% |
NiO |
99.9% |
Nb2Ox, Nb2O5 |
99.99% |
SiO, SiO2 |
99.99% |
Ta2O5 |
99.99% |
Ta2O5-Er2O3 |
99.9%, 95/5wt%, made per requested |
TiO, TiO2, Ti3O5, Ti2O3 |
99.5% |
SnO2, SnO |
99.9% |
In2O3-SnO2 |
99.99%, 90/10wt%, 95/5wt%, made per requested |
WO3 |
99% |
WO3-Al |
99.9%, 90/10wt%, made per requested |
WO3-Li |
99.9%,97/3wt%, made per requested |
ZrO2-Y2O3 (YSZ) |
99.95%, 85/15wt%, made per requested |
ZrO2 |
99.5% |
ZnO |
99.99% |
Ga2O3-ZnO (GZO) |
99.99%, 90/10wt%, made per requested |
In2O3-Ga2O3-ZnO (IZGO) |
99.99%, 95/5/5at%, made per requested |
We have only listed the more popular material. Please feel free contact us with any special requirements at any times, we will try to get back for you ASAP.